| 品牌 : | 爱德华 | 是否进口 : | 否 |
| 产地 : | 英国 | 加工定制 : | 否 |
| 型号 : | IF30K | 电源电压 : | 380V |
| 用途 : | 抽真空 | 尺寸 : | 234*334*224cm |
Edwards IF30K 爱德华真空泵维修
Product Description
Edwards iF30K Vacuum pump and blower
Part# NRC3-21-000
Booster speed m3/hr – 1800
Backing Pump Speed m3/hr – 400
Performance <1x10-2> 2hours with ultimate of (torr) 4.4×10-3 torr
Electricial 380-440v 3ph 50/60 Hz, 200-230V 3ph 50/60 Hz
Pump supplied without TIM (Tool Interface Module). Set up with jumper for local operation with Pump Display Module (not included) Available at addtional cost.
Pump is used. Recommended for load lock applications. Skidded on treated pallet.
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Edwards iF30K Vacuum pump and blower
Part# NRC3-21-000, Ser # 109323271
Booster speed m3/hr – 1800
Backing Pump Speed m3/hr – 400
Performance <1×10-2 torr
Tested for > 2hours with ultimate of (torr) 4.4×10-3 torr
Electricial 380-440v 3ph 50/60 Hz, 200-230V 3ph 50/60 Hz
Pump supplied without TIM (Tool Interface Module). Set up with jumper for local operation with Pump Display Module (not included) Available at addtional cost.
Pump is used. Recommended for load lock applications. Skidded on treated pallet.
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Edwards iF30K Semiconductor Dry Vacuum Pump - REBUILT
Edwards iH and iF system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination. We also offer repair service.
Gas Module: controls nitrogen purges and monitors exhaust pressure.
Dry Pump Control Module: controls the gas module, interprets signals from thermocouples and other sensors, and activates warning and alarms when necessary.
Electrics Module: used for low voltage power requirements.
Dry Pump Display Terminal: hand-held module (game boy) normally kept above the electronics enclosure which allows simple local monitoring and control.
