| 品牌 : | 爱德华 | 是否进口 : | 否 |
| 产地 : | 英国 | 加工定制 : | 否 |
| 型号 : | iH1800 | 电源电压 : | 380V |
| 用途 : | 抽真空 | 尺寸 : | 334*224*667cm |
Edwards iH1800
Edwards iH1800 Semiconductor Dry Vacuum Pump - REBUILT
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
| Peak speed | 1,800 m3h-1 |
| 1,060 cfm | |
| 30,000 l/min-1 | |
| Ultimate vacuum | 1 x 10-3 mbar |
| 7.5 x 10-4 Torr | |
| 0.1 Pa | |
| Typical shaft seal nitrogen flow | 4 slm |
| Inlet connection | ISO160 |
| Outlet connection | NW40 |
| Typical cooling water flow at 15 psi pressure drop | 240 l/h-1 |
| 4 l/min-1 | |
| Weight | 502 kg |
| Power input at ultimate | 4.1 kW |
| Rated motor power | 7.0 kW |
| Oil capacity | 1.6 l |
All figures are typical without gas ballast.
