荏源EBARA A10S苏州荏源真空泵保养 中芯国际真空泵保养 常州真空泵保养

荏源EBARA A10S苏州荏源真空泵保养 中芯国际真空泵保养  常州真空泵保养

代理销售国际真空泵与维修包，英国BOC EDWARDS爱德华真空泵,法国ALCATEL阿尔卡特真空泵,德国LEYBOLD莱宝真空泵等,本拥有的维修工厂提供服务。

1.荏源（ebara）:

      干泵（pump）：40*20,65*40,50*20,80*25,150*40,A07V,A10S,A25S,A30W,A70W,A150W

2.爱德华（edwards）:

单级油泵（oil pump）：E1M5, E1M8, E1M12, E1M18, E1M40, E1M80, E1M175, E1M275

双级油泵(oil pump)：E2M0.7, E2M1, E2M1.5, E2M2, E2M5, E2M8, E2M12, E2M18 , E2M28, E2M40,E2M80, E2M175, E2M275

RV 油泵(oil pump)：RV3, RV5, RV8, RV12

增压泵(Booster / Roots): EH250, EH500, EH1200, EH2600, EH4200 QMB-250, QMB500, QMB1200  PHMB1800

干泵（dry pump）: QDP40,QDP80,IQDP40,IQDP80, ,IF1800，GV250，GV400，GV600

3.阿尔卡特(ALCATEL ):

单级油泵（oil pump）:1004A,1012A,1030,1033,1060,1063

I系列油泵（oil pump）:2002I, 2005I, 2010I, 2015I, 2021I;

SD系列油泵（oil pump）：2005SD, 2010SD, 2021SD, 2021SD, 2033SD, 2063SD, 2100SD;

C1系列油泵（oil pump）:2005C1, 2010C1, 2021C1, 2033C1, 2063C1, 2100C1;

C2系列油泵（oil pump）:2010C,22021C2,2033C2,2063C2;

H1系列油泵（oil pump）:205H1,2015H1,2033H1,2063H1;

RSV 系列增压泵（booster roots）: RSV151，RSV151B,RSV301，RSV301B,RSV601，RSV601B,RSV1002,RSV1502，RSV2000

      干泵（dry pump）:ADP122,ADS602P ADS602H ADS1202P ADS1202H ADS1802P ADS1802H

4. 莱宝真空泵(LEYBOLD)

SOGEVAC系列单级油封璇片真空泵：SV10 SV16 SV25 SV40 SV65 SV100 SV200 SV300 SV500 SV580 SV630 SV750 SV1200

TRLVAC C系列双级油封璇片泵：D2 D4 D8 D9 D16 D25 D30 D40 D60 D65 D90

RUVAC系列罗茨泵：WA/WAU 150/151/250/251/500/501/1000/1001/2000/2001

5．爱发科（ULVAC）:

油泵（oil pump）: EC-403,EC-603,EC-803,D-330DK,D-650DK,

D-950DK, VD-301,VD-401,VDS2401

增压泵（booster）:PMB001C,PMB003C,PMB006C,PMB012C PMB024C, PMB040B,PMB060B       EBARA真空泵维修

EBARA A10S Multi-Stage Dry Vacuum Pump - REBUILT

Technical Characteristics

• Complete pump safeguard system

• High pump operating temperature preventing condensation

• Low noise and low vibration

• Corrosion resistant materials-stainless steel coolers, water circuits

• High reliability even for harsh processes

• Efficient interstage coolers for LPCVD nitride process

• Canned motor

• Low service requirements

• Control panel for monitoring operating conditions

Customer Benefits

• Very low nitrogen consumption for purging

• Clean room compatible

• Low service requirements

• Compact size and small footprint

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

ModelA25SA10SA07VPumping speed (50 / 60 Hz)2,500 / 3,000 L/min1,000 / 1,200 L/min700 / 840 L/minUltimate pressure (50 / 60 Hz)5.3 / 4.0Pa1.1 / 1.0 PaConnectionGas inletNW50NW40Gas outletNW40Motor2P 3.7 kW2P 2.2 kW2P 1.5 kWCooling waterConnectionCoupler (Rc 3/8)Pressure [gauge press.]Supply: Max. 0.4 MPa, Differential press.: Min. 0.1 MPaFlow rateMin. 3.5 L/minTemperatureMax. 30°CN2 GasConnection1/4” tube fitting (same as Swagelok®)Pressure [gauge press.]Supply: 0.1-0.7 MPa, Setting: 0.04-0.07 MPaApprox. flow rate17-20 Pa m3/s [3.4 Pa m3/s]15-19 Pa m3/s [3.4 Pa m3/s]Duct ventilationConnectiond50 mm x L50 mmd50 mm x L60 mmPressure-196 PaApprox. flow rate0.5 m3/minLubrication OilBrandFOMBLIN Y-L VAC 25/6 BARRIERTA J100 DEMNUM S-65 KRYTOX VPF 1525Quantity0.4 L0.5 LApprox. weight240 kg220 kg150 kgPower supplyPhase/volt/freq.3 Phase, 200V (50 Hz), 200-220 V (60Hz)Current rating (50 / 60 Hz)18.3 / 17.5 A11.7 / 11.1 A8.4 / 8.6 AConnectionMS Series 22-22MS Series 20-4(Japan Aviation Electronics Industry)Control signal57 Series 50 (DDK. Ltd)