| 产品特性 : | 热销 | 类型 : | 气体捕集泵 |
| 品牌 : | 爱发科 | 型号 : | LR421-T |
| 材质 : | 铸铁 | 用途 : | 管道泵 |
| 原理 : | 罗茨泵 | 真空度 : | 高真空度 |
| 驱动方式 : | 电动 | 性能 : | 耐磨 |
| 极限压力 : | 5 | 抽气速率 : | 100 |
| 抽气量 : | 440m³/h | 重量 : | 415 |
| 电压 : | 180～240/380～440（50/60） | 排出口径 : | VG50 |
| 流量 : | 440 | 规格 : | LR421-T |
多级罗茨型干泵
LR 系列
LR421
ULVAC
干泵LR系列，根据独有的高温均热化技术，有效利用压缩热，实现了在CVD，蚀刻等硬工艺中的高耐久性。在轻工艺中，与ECO-SHOCK的组合 多可节省约80%的电力。 另外，提高了维护性和降低了噪音，全部型号CE对应可能（可选）。关于ECO-SHOCK的详细信息，请参考关联信息。
特点
LR系列：低温领域
不单是惰性气体，还特别适用于装载和卸载室中的排气，缩短排气时间以增加产量。HR系列/UR系列：高温领域
CVD，蚀刻等产生的可升华的废气物质可以在气体状态下排出。1000毫秒内瞬时中断。
符合CE标志（可选）。
用途
活性气体（CVD、干刻等）
惰性气体（溅射,蒸发，热处理等）
放入取出室排气时间缩短（LR系列）
产生粉尘的工艺的排气（Si单晶体上升等）
作为辅助排气泵（涡轮分子泵、机械增压泵的辅助排气）
规格
| Model | LR/HR 60 |
LR/HR 90 |
LR 180 |
LR 421 |
LR 421-T |
UR 421-T |
LR/HR 300 |
LR/HR 600 |
UR 600 |
LR/HR 1200 |
UR 1200 |
||
| Pump | DRP | LR/HR 60 |
LR/HR 90 |
LR 180 |
LR 421 |
LR 421-T |
UR 421-T |
LR/HR 60 |
LR/HR 90 |
UR 90 |
LR/HR 90 |
UR 90 |
|
| MBP | － | PRC-003A | PRC-006A | PRC-012A | |||||||||
| Max. pumping speed | m3/h | 50Hz | 62 | 112 | 183 | 440 | 440 | 410 | 359 | 653 | 653 | 1012 | 1012 |
| 60Hz | 80 | 126 | 237 | 365 | 701 | 1051 | |||||||
| L/min | 50Hz | 1030 | 1860 | 3100 | 7333 | 7333 | 6833 | 5980 | 10900 | 10883 | 16900 | 16867 | |
| 60Hz | 1333 | 2100 | 3950 | 6080 | 11700 | 17500 | |||||||
| Ultimate pressure | Pa | 5.0 | 0.67 | ||||||||||
| Max. inlet pressure | Atmospheric pressure * | ||||||||||||
| Max. exhaust pressure | 1.0 to Atmospheric pressure | ||||||||||||
| Inlet diameter (type CE) | VG50 (KF40) |
VG80(KF50) | VG100 | VG80(KF80) | VG100(KF100) | ||||||||
| Outlet diameter | KF40 | VG50 | KF40 | ||||||||||
| DRP: Rotor blade surface treatment | ○ | ○ | ○ | ○ | ○ | ○ | ○ | ○ | ○ | ○ | ○ | ||
| MBP: Rotor blade surface treatment | - | - | - | - | - | - | ○ * | ○ * | ○ | ○ * | ○ | ||
| Weight | kg | 180 | 245 | 335 | 415 | 251 | 371 | 403 | |||||
| Power | Three phase | VAC (Hz) |
200（50/60), 220(60) | 180～240/380～440（50/60） | 200（50/60), 220(60) | ||||||||
| Current | At ultimate pressure | A | 6.9/7.1 | 11.2 | 18.9 | 20.8 | 23 | 7.0/7.8 | 12.3/12.9 | 16.4 | 13.7/15.4 | 18.9 | |
| At max. load | A | 7.0/7.3 | 11.8 | 20.6 | 48.5 | 52.5 | 9.6/8.1 | 19.0/13.8 | 17.3 | 24.2/18.9 | 22.4 | ||
| Cooling water Supply pressure | MPa | 0.1 to 0.3 | 0.2 to 0.5 | 0.1 to 0.3 | |||||||||
| Cooling water In/Out differrence pressure |
MPa | ＞0.1 | ＞0.2 | ＞0.1 | |||||||||
| Cooling water Flow rate |
L/min | ＞5.0 | ＞4.0 | ＞5.0 | ＞5.0 | ||||||||
| N2 gas | Supply pressure | MPa | 0.1 ～ 0.5 | ||||||||||
| Regu-lated pressure | MPa | 0.05 ～ 0.1 | |||||||||||
| N2 purge | Shaft purge | SLM | 5 | ||||||||||
| Gas ballast | SLM | 0～45 | None *1 | 0～45 | 0～195 | 0～45 | |||||||
*Please specify voltage at the time of ordering.
*LR pump designed for low operating temperature of the pump body. The HR is for high temperature pump body operation. While the UR series is for Ultra High pump body temperature.
*The HR300, HR600, HR1200,UR600,UR1200,UR1800 and UR3601-TT models should all be operated below 200Pa (1.5 Torr).
*The LR3601-R/TR/TTR is an improved exhaust performance model in the high-pressure area.
*〇=with ×=with out
*MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
*Additionally, a pump with gasballast use is possible to quote. Please contact us for the selection and quotation.
■Silencer (Option)
| Model | Material | Surface treatment | Weight (kg) | Flange Connection |
| RS-01 | SUS304 | GBB treatment | 4.1 | NW40 |
| RS-02 | SUS304 | GBB treatment | 8.3 | NW40 |
| RS-03 | SUS304 | Polished plate | 12.5 | NW50 |
■Acceptable Table
| Kit type | Agreement | Clamp | Outer ring | Connection Flange | Stay |
| RS-01 kitA | LR60,LR90,LR300 | 1 | 1 | - | - |
| RS-01 kitB | LR600,LR1200 | 2 | 2 | 1 | 1 |
| RS-02 kitA | LR180（LR60,LR90,LR300） | 2 | 2 | 1 | 1 |
| RS-02 kitB | LR1800（LR600,LR1200） | 2 | 2 | 1 | 1 |
| RS-03 kitA | LR421(-T) | 1 | 1 | 1 | 1 |
| RS-03 kitB | LR3601(-T/TT/R/TR/TTR） | 3 | 3 | 1 | 1 |
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