荏源EBARA A07V真空泵维修 上海荏源真空泵维修 扬州真空泵维修 徐州真空泵维修

荏源EBARA A07V真空泵维修  上海荏源真空泵维修 

 扬州真空泵维修 徐州真空泵维修

EBARA真空泵系列包括：
EBARA A07V， EBARA A10W，EBARA A25，EBARA A30W，EBARA A70W
EBARA AA10 ，EBARA AA30，EBARA AA40，EBARA AA70 ，EBARA AA100，EBARA AAS70
EBARA-A07V，EBARA A10S，EBARA A25S
EBARA 40X20
等
EBARA 40X20,EBARA 50X20,EBARA 65X40,EBARA 80X25,EBARA 1540X40
EBARA A07V,EBARA A10S,EBARA A25S,EBARA A30W,EBARA A70W,EBARA A150W
EBARA AA10,EBARA AA20 ,EBARA AA30 ,EBARA AA40,EBARA AA70,EBARA AA100,EBARA AA200
EBARA AAS10N,EBARA 20N,EBARA AAS40N,EBARA AA70N,EBARA AA 100,EBARA AA 200,EBARA AA 300WN

EBARA A07V Multi-Stage Dry Vacuum Pump - REBUILT

Technical Characteristics

• Complete pump safeguard system

• High pump operating temperature preventing condensation

• Low noise and low vibration

• Corrosion resistant materials-stainless steel coolers, water circuits

• High reliability even for harsh processes

• Efficient interstage coolers for LPCVD nitride process

• Canned motor

• Low service requirements

• Control panel for monitoring operating conditions

Customer Benefits

• Very low nitrogen consumption for purging

• Clean room compatible

• Low service requirements

• Compact size and small footprint

ModelA25SA10SA07VPumping speed (50 / 60 Hz)2,500 / 3,000 L/min1,000 / 1,200 L/min700 / 840 L/minUltimate pressure (50 / 60 Hz)5.3 / 4.0Pa1.1 / 1.0 PaConnectionGas inletNW50NW40Gas outletNW40Motor2P 3.7 kW2P 2.2 kW2P 1.5 kWCooling waterConnectionCoupler (Rc 3/8)Pressure [gauge press.]Supply: Max. 0.4 MPa, Differential press.: Min. 0.1 MPaFlow rateMin. 3.5 L/minTemperatureMax. 30°CN2 GasConnection1/4” tube fitting (same as Swagelok®)Pressure [gauge press.]Supply: 0.1-0.7 MPa, Setting: 0.04-0.07 MPaApprox. flow rate17-20 Pa m3/s [3.4 Pa m3/s]15-19 Pa m3/s [3.4 Pa m3/s]Duct ventilationConnectiond50 mm x L50 mmd50 mm x L60 mmPressure-196 PaApprox. flow rate0.5 m3/minLubrication OilBrandFOMBLIN Y-L VAC 25/6 BARRIERTA J100 DEMNUM S-65 KRYTOX VPF 1525Quantity0.4 L0.5 LApprox. weight240 kg220 kg150 kgPower supplyPhase/volt/freq.3 Phase, 200V (50 Hz), 200-220 V (60Hz)Current rating (50 / 60 Hz)18.3 / 17.5 A11.7 / 11.1 A8.4 / 8.6 AConnectionMS Series 22-22MS Series 20-4(Japan Aviation Electronics Industry)Control signal57 Series 50 (DDK. Ltd)