| 品牌 : | 爱德华 | 是否进口 : | 否 |
| 产地 : | 英国 | 加工定制 : | 否 |
| 型号 : | IPUP2 | 电源电压 : | 380V |
| 用途 : | 抽真空 | 尺寸 : | 334*224*667cm |
Edwards IPUP2 - REBUILT
| Weight | 205 lbs |
|---|---|
| Pumping Speed | 61.8 cfm |
| Ultimate Pressure | 5 x 10-3 mbar |
Edwards IPUP2 Semiconductor Dry Vacuum Pump - REBUILT
IPUP2 is small and light for load lock and clean applications. It’s low vibration and low noise levels make it ideal for on-tool use or within a fab’s waffle foor, helping to save valuable fab floor space while maximising pumping performance. Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!
Edwards Group Ltd. has introduced the IPUP2, an integrated point-of-use pump for load-lock and transfer chamber applications on Applied Materials’ manufacturing platforms and for use by semiconductor manufacturers.
The second-generation device reduces pump down times by ~50%, uses 70% less energy and requires no maintenance between overhauls. Its power curve and pumping speed (180 m3/h) have been optimized to increase tool throughput. Peak pumping speed is 89% faster than first-generation pumps and down times are up to 54% faster.
The pump includes horizontal and vertical inlets, and its size and configuration enable direct swaps with previous-generation pumps. It has demonstrated a mean time between failures (MTBF to Semi E10 standards) of more than five years with in excess of 3 million load-lock cycles.
18121353183