| 品牌 : | 爱德华 | 是否进口 : | 否 |
| 产地 : | 英国 | 加工定制 : | 否 |
| 型号 : | iGX100N | 电源电压 : | 380V |
| 用途 : | 抽真空 | 尺寸 : | 334*224*667cm |
英国爱德华edwards iGX100N干式真空泵维修保养,优惠
Edwards 是的开发商和生产商，提供的真空产品、减排解决方案和相关的增值服务。
Edwards的产品是半导体、平板显示器、LED 和太阳能电池的制造过程中不可缺少的部分，应用于日益多范围化的工业过程，包括电力、玻璃和其他涂层应用、钢和其他冶金、制药和化学；适用于科学仪器和许多研发应用。
Edwards iGX 干泵提供多用途的真空泵平台，具备可靠的性能，适用于从清洁到中度负荷的硅半导体和化合物半导体应用。紧凑的外形和低振动运行，使 iGX 泵可以采用工具上、近程或远程安装方式，从而获得极高的灵活性，并进而节省空间，终降低总运行成本。iGX 泵还可提供以太网连接和其他网络连接选项。
干式真空泵在使用过程中常见故障：
1、泵卡死不能运转
2、真空度降低
3、起动困难
4、真空度抽不上去或抽上去稳不住
5、噪音大
228、电机发热
干式真空泵行业应用：
1. 分析仪器; 2. 电子显微镜; 3. 表面分析仪; 4. 检漏仪; 5. 质谱仪; 6. 光谱仪; 7. R
Edwards iGX100N Semiconductor Dry Vacuum Pump - REBUILT
The iGX dry vacuum pump series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
| Peak speed | |
| 62 cfm | |
| 1,750 l min-1 | |
| Ultimate pressure | 5.00E-03 mbar |
| 3.75E-03 Torr | |
| 0.50 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water inlet* | 1 slm |
| Nitrogen | 4 or 14 slm |
| Footprint excluding exhaust | 0.20 m2 |
| Weight | 120 kg |
| Inlet connection | ISO63 |
| Outlet connection | NW25 |
| Noise at ultimate | < 55 db(a) |
* Requires constant flow valve accessory.
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