爱德华Edwards iL70真空泵维修 宁波爱德华真空泵维修 华红真空泵维修 湖州真空泵维修

昆山熙日机械设备有限是爱德华真空泵维修厂家。我司拥有一支精湛的真空泵维修技术人员，以及高段真空、段真空泵无尘维修车间。主要维修Edwards爱德华无油干式螺杆泵、分子泵、罗茨泵、旋片泵、涡旋泵等。Edwards爱德华QDP40系列干式螺杆真空泵维修，0返修率、，其极限真空度能达到您生产工艺需求！

维柯真空主要维修Edwards爱德华真空泵以下主要机型：

E2M1.5、E2M2、E2M5、E2M8、E2M12、E2M18、E2M28、E2M30、E2M40、E2M80, E2M175、E2M275、E2M0．7、E2M1、E1M5、E1M8、E1M18、E1M40 E2M40、E1M80、E1M175、E1M275、E-Lab2

爱德华 RV 系列RV3, RV5, RV8, RV12

爱德华 EH 系列EH250, EH500, EH1200, EH2600, EH4200

爱德华 QMB 系列 QMB-250, QMB500, QMB1200

爱德华 QDP/IQDP 系列 QDP40、QDP80、IQDP40、IQDP80

爱德华 IL 系列 IL600、IL70

爱德华 IHBO 系列 IH600、IH160HTX、IH800、IH1000、IH1800、ih1800HTX

爱德华 IF系列 IF1800、IF3000

爱德华 IXH系列 IXH100、IXH200H、IXH610、IXH1210、IXH1220H、IXH1820、IXH1820H、IXH1820T、IXH3030、IXH3030T 、 IXH3045H、IXH4545HT、IXH6045H、IXH6045HT、PXH4500、PXH6000 IXL500Q、IXL500R

爱德华 GV系列 干式螺杆泵 GV80、GV160、GV250、GV400、GV260M、GV410M、GV600M

Edwards QMB系列爱德华真空泵 QMB-250、QMB500、QMB1200等

Edwards iL70 Semiconductor Dry Vacuum Pump - REBUILT

The iL70 Series Dry pumps have been specifically designed to provide reliable operation over a wide range of applications. These Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iL70 Series operate under the most arduous conditions in the world&＃39;s top wafer fab manufacturing plants and have been proven to require zero periodic maintenance. The iL70 series provide applications specific to the semiconductor fabrication processes. The iL70 Dry Vacuum Pumps are ideally suited to loadlock, transfer chamber, PVD, SEM and similar duties. The iL70 system has an LCDP70 dry pump and enclosed water cooled motors. This system is fully enclosed, and includes seismic restraints. A PDT, available as an accessory, enables you to manually operate the iL system and to display its status.

Peak Speed    50 Hz70 m3h1 / 41 cfm    60 Hz84 m3h1 / 49 cfmUltimate vacuum    60 Hz2.3 x 10-2 Torr / 3 x 10-2 mbar    50 Hz3.8 x 10-2 Torr / 5 x 10-2 mbarTypical Shaft Seal0Inlet connectionISO63Outlet ConnectionNW40Typical cooling water flow (15 psi)    90 1 h-1 / 1.5 1 min-1Weight230 kg / 506 lbsPower input    60 Hz1.5 kW    50 Hz1.3 kWRated motor    60 Hz2.2 kW    50 Hz1.8 kWOil capacity.75 liter