| 品牌 : | 爱德华 | 是否进口 : | 否 |
| 产地 : | 英国 | 加工定制 : | 否 |
| 型号 : | iGX600N | 电源电压 : | 380V |
| 用途 : | 抽真空 | 尺寸 : | 234*445*445cm |
熙日从事edwards干泵维修。熙日是正规的维修工厂，拥有维修SOP。edwards iGX600N爱德华干泵维修保证质量，edwards干泵iGX600N维修基本无返修状况，edwards真空泵维修收费合理，edwards真空泵维修服务品质到位，是供应商理想的选择！
熙日致力于干泵维修，干泵保养，翻新进口真空泵服务及进口真空维修技术支持。
目前主要维修的品牌：法国Alcatel阿尔卡特干泵,美国Agilent安捷伦干式涡轮泵,德国Leybold莱宝干泵,日本EBARA荏原干泵,德国BUSCH普旭干泵,德国BECKER贝克干泵,美国WELCH韦尔奇干式WOB-L活塞泵,德国Pfeiffer普发干式真空泵,英国Edwards爱德华小型湿/干泵,日本ULVAC爱发科干式真空泵,美国GAST嘉士达干泵,德国Rietschle里其乐干泵,日本Orion好利旺干式真空泵,日本IWATA岩田无油涡旋式干泵,日本Kashiyama樫山干泵。
干式真空泵常见故障：
液体侵入
灰尘堆积
抽取稀有贵重气体
在极限压力下运行
不当的温度波动
温度控制
快速抽空
启动泵
Edwards iGX600N Dry Vacuum Pump
Edwards iGX600N Semiconductor Dry Vacuum Pump - REBUILT
The iGX dry vacuum pump series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
| Peak speed | 620 m3h-1 |
| 365 cfm | |
| 10,333 l min-1 | |
| Ultimate pressure | 7.00E-04 mbar |
| 5.25E-04 Torr | |
| 0.07 Pa | |
| Power at 700 Torr exhaust | |
| Ultimate | 1.6 kW |
| AUC (Active Utility Controller) | 0.05 kW |
| Water inlet* | 2 slm |
| Nitrogen | 4 or 14 slm |
| Footprint excluding exhaust | 0.20 m2 |
| Weight | 220 kg |
| Inlet connection | ISO100 |
| Outlet connection | NW25 |
| Noise at ultimate | <55 db(a) |
* Requires constant flow valve accessory.
18121353183